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Ultrahigh 22 nm resolution EUV coherent diffraction imaging using a tabletop 13 nm high harmonic source

We implement coherent diffractive imaging (CDI) using a phase-matched high-harmonic generation (HHG) source at 13 nm, demonstrating reconstructed images with a record 22 nm resolution for any tabletop, light-based microscope. We also demonstrate the first reflection-mode CDI using a compact extreme ultraviolet (EUV) source, achieving ...

by Seaberg M, Adams D, Zhang B, Gardner D, Murnane M, Kapteyn H

Tags: HHG, Coherent Diffractive Imaging, Mask Inspection, Phase Retrieval, X-Ray Imaging

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