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Ultrahigh 22 nm resolution EUV coherent diffraction imaging using a tabletop 13 nm high harmonic source

We implement coherent diffractive imaging (CDI) using a phase-matched high-harmonic generation (HHG) source at 13 nm, demonstrating reconstructed images with a record 22 nm resolution for any tabletop, light-based microscope. We also demonstrate the first reflection-mode CDI using a compact extreme ultraviolet (EUV) source, achieving ...

by Seaberg M, Adams D, Zhang B, Gardner D, Murnane M, Kapteyn H

Tags: HHG, Coherent Diffractive Imaging, Mask Inspection, Phase Retrieval, X-Ray Imaging

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Wide Field-of-View Reflection-Mode Ptychographic Imaging Microscope with Tabletop 12.7 nm High Harmonic Illumination

High-resolution imaging is an invaluable tool for understanding nanoscale systems. In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) can combine femtosecond (fs) pulse durations with nanometer resolution and elemental-, spin-, electronic-and ...

by Tanksalvala M; Porter C; Gerrity M; et al.

Tags: HHG, Coherent Diffractive Imaging, EUV

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Generation of High Harmonics of Coherent Radiation in the Extreme Ultraviolet Spectral Range in the Low-Intensity Regime

Generation of high harmonics is the only available way to obtain coherent extreme ultraviolet (EUV) and soft X-ray radiation in laboratory conditions. We present a system for high harmonics generation and study of its parameters. Capillary waveguide filled with Ar gas is used to convert the pumping laser radiation from a Ti:Sapphire mode-locked ...

by Dimitrov N; Stoyanov L; Stefanov I; et al.

Tags: HHG, EUV

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Coherent Ptychographic Imaging Microscope With 17.5nm Spatial Resolution Employing 13.5nm High Harmonic Light

High-resolution imaging is an essential tool for understanding nanoscale systems. In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) are ideal for investigating complex nanostructured systems, including their ...

by Tanksalvala M; Gardner D; Mancini G.

Tags: HHG, Coherent Diffractive Imaging, EUV

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