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Attosecond light science and its application for probing quantum materials

In this paper, the authors review the development and application of coherent short wavelength light sources implemented using the high harmonic generation (HHG) process, such as the KMLabs by Brad Sohnlein

Tags: High Harmonic, XUUS, Ti:Sapphire, HHG, Coherent Diffractive Imaging, Mask Inspection, Phase Retrieval, X-Ray Imaging, Semiconductor, EUV, imaging, lithography, nanoscale characterization, semiconductor technology, VUV, ARPES, time-resolved ARPES, extreme ultraviolet source, materials characterization, quantum, soft X-ray, surface-to-near-surface, ultrafast spectroscopy

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Full characterization of ultrathin 5-nm low- k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties

Ultrathin films and multilayers, with controlled thickness down to single atomic layers, are critical for advanced technologies ranging from nanoelectronics to spintronics to quantum devices. However, for thicknesses less than 10 nm, surfaces and dopants contribute significantly to the film properties, ...

by Brad Sohnlein

Tags: High Harmonic, XUUS, Ti:Sapphire, HHG, Semiconductor, EUV, imaging, nanoscale characterization, semiconductor technology, extreme ultraviolet source, nanostructures, materials characterization, surface-to-near-surface, ultrafast spectroscopy

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Field Ion Emission in an Atom Probe Microscope Triggered by Femtosecond-Pulsed Coherent Extreme Ultraviolet Light

3D pulsed laser atom probe tomography (APT)  is an atomic scale materials characterization and 3D imaging method utilizing ultrafast pulses to induce photon assisted field ion evaporation in certain materials. Currently, modern APT measurements employ coherent, pulsed near ultraviolet (NUV) light to induce the field ion evaporation ...

by Brad Sohnlein

Tags: High Harmonic, XUUS, Ti:Sapphire, HHG, EUV, extreme ultraviolet source, materials characterization, spectroscopy, ultrafast spectroscopy, Atom Probe Tomography

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Ultrahigh 22 nm resolution EUV coherent diffraction imaging using a tabletop 13 nm high harmonic source

We implement coherent diffractive imaging (CDI) using a phase-matched high-harmonic generation (HHG) source at 13 nm, demonstrating reconstructed images with a record 22 nm resolution for any tabletop, light-based microscope. We also demonstrate the first reflection-mode CDI using a compact extreme ultraviolet (EUV) source, achieving ...

by Seaberg M, Adams D, Zhang B, Gardner D, Murnane M, Kapteyn H

Tags: HHG, Coherent Diffractive Imaging, Mask Inspection, Phase Retrieval, X-Ray Imaging

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Wide Field-of-View Reflection-Mode Ptychographic Imaging Microscope with Tabletop 12.7 nm High Harmonic Illumination

High-resolution imaging is an invaluable tool for understanding nanoscale systems. In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) can combine femtosecond (fs) pulse durations with nanometer resolution and elemental-, spin-, electronic-and ...

by Tanksalvala M; Porter C; Gerrity M; et al.

Tags: HHG, Coherent Diffractive Imaging, EUV

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Generation of High Harmonics of Coherent Radiation in the Extreme Ultraviolet Spectral Range in the Low-Intensity Regime

Generation of high harmonics is the only available way to obtain coherent extreme ultraviolet (EUV) and soft X-ray radiation in laboratory conditions. We present a system for high harmonics generation and study of its parameters. Capillary waveguide filled with Ar gas is used to convert the pumping laser radiation from a Ti:Sapphire mode-locked ...

by Dimitrov N; Stoyanov L; Stefanov I; et al.

Tags: HHG, EUV

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Coherent Ptychographic Imaging Microscope With 17.5nm Spatial Resolution Employing 13.5nm High Harmonic Light

High-resolution imaging is an essential tool for understanding nanoscale systems. In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) are ideal for investigating complex nanostructured systems, including their ...

by Tanksalvala M; Gardner D; Mancini G.

Tags: HHG, Coherent Diffractive Imaging, EUV

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