KMLabs' XUUS-5 integrated in-situ with Spectra-Physics Solstice® Ace™ delivers high-flux 30-120 eV EUV photons

KMLabs' XUUS-5 delivers exceptional performance when driven directly by Light Conversion's PHAROS laser, enabling a range of scientific applications in an ultracompact setup.

Recap of KMLabs' co-founder, Dr. Margaret Murnane's 5/14 CLEO Plenary Speech on "Harnessing Attosecond Quantum Technologies".

KMLabs' XUUS is the EUV source for the world’s first phase-sensitive EUV imaging reflectometer .  This work represents a fundamentally new and useful approach for imaging nanostructures and nanomaterials. 

Recap of KMLabs' co-founder, Dr. Henry Kapteyn's 3/24 OSA webinar on High-Harmonic Sources for Material Development and Metrology in the Semiconductor Industry.

KMLabs' 13nm XUUS is the HHG source used for the printing of 20nm pitch line/spaces (a world record) using interference lithographic imaging of an Inpria metal-oxide resist under high-NA conditions.

KMLabs' Hyperion VUV was featured by Prof. Katherina Kohse-Hoinghaus in the opening lecture of 38th International Symposium on Combustion (1/25-1/29/2021 Adelaide, Australia) as one of the three promising combustion technologies!

Webinar Replay:  Learn how imec is implementing KMLabs' tabletop-scale EUV laser technology to study the fundamentals of 13.5 nm EUV lithography. 

Webinar Replay: learn how our XUUS high harmonic generation sources are ideal for time- and angle-resolved photoemission spectroscopy (tr-ARPES).