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KMLabs' XUUS™-5 integrated in-situ with Spectra-Physics Solstice® Ace™ delivers high-flux 30-120 eV EUV photons

July 7, 2021

Using a Spectra-Physics Solstice Ace Ti:sapphire-based femtosecond amplifier and a KMLabs’ XUUS-5 high-harmonic-generation system we demonstrate a high flux, stable, coherent EUV light source with...

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Recap of 5/14 CLEO Plenary Speech "Harnessing Attosecond Quantum Techologies"

June 6, 2021
KMLabs co-founder, Prof. Margaret Murnane, Ph.D gave the Plenary Speech hosted on 5/14 by CLEO conference 2021 featuring the technological advances and significance towards developing a tabletop...
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KMLabs recognized for exporting excellence in Colorado

May 21, 2021

KMLabs is honored to be among the awardees for 2021 Governor's Award for Excellence in Exporting.

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KMLabs' XUUS-5 high harmonic source delivers exceptional performance when driven directly by Light Conversion's PHAROS laser

May 6, 2021

Using Light Conversion’s industrial-grade PHAROS femtosecond laser and KMLabs’ XUUSTM-5 high-harmonic-generation system we demonstrate a high flux, ultrastable, coherent EUV light source with...

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Recap of 3/24 OSA webinar "High-Harmonic Sources for Material Development and Metrology in the Semiconductor Industry"

April 22, 2021

The webinar hosted on 3/24 by the OSA Short Wavelength Sources and Attosecond/High Field Physics Technical Group showcased a very recent important technological application of attosecond science...

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Attolab uses KMLabs' 13nm EUV source to demonstrate the high-NA capabilities of EUV interference lithography

February 10, 2021

Imec, a world leader in nanoelectronics and digital technologies, reported using KMLabs' 13.5 nm XUUS high harmonic generation source for printing 20nm pitch line/spaces using interference...

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Hyperion VUV named one of three promising combustion technologies at 38th International Symposium on Combustion

February 3, 2021

In her opening lecture at 38th International Symposium on Combustion in late January 2021, Prof. Katherina Kohse-Hoinghaus featured KMLabs' Hyperion VUV light source as one of the three promising...

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World's first phase-sensitive EUV imaging reflectometer on 3D nanostructure characterization

February 1, 2021

KMLabs, STROBE Science and Technology Center at CU Boulder, and imec's Attolab have worked collaboratively to present the world's first phase-sensitive extreme ultraviolet (EUV) imaging...

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Replay ICALEO Talk:  Update on imec's attolab

October 19, 2020
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Replay FiO Talk on MHz VUV Laser Technology

September 15, 2020

New Class of MHz Repetition-rate Vacuum-ultraviolet Laser Source Based on Highly-cascaded Harmonic Generation

Highly-cascaded harmonic generation (HCHG) process allows for coherent upconversion of...

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