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Full characterization of ultrathin 5-nm low- k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties

Ultrathin films and multilayers, with controlled thickness down to single atomic layers, are critical for advanced technologies ranging from nanoelectronics to spintronics to quantum devices. However, for thicknesses less than 10 nm, surfaces and dopants contribute significantly to the film properties, ...

by Brad Sohnlein

Tags: High Harmonic, XUUS, Ti:Sapphire, HHG, Semiconductor, EUV, imaging, nanoscale characterization, semiconductor technology, extreme ultraviolet source, nanostructures, materials characterization, surface-to-near-surface, ultrafast spectroscopy

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