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Porter C; Tanksalvala M; Gerrity M; et al.

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General-purpose, wide field-of-view reflection imaging with a tabletop 13  nm light source

Lensless imaging with short-wavelength light is a promising method for achieving high-resolution, chemically sensitive images of a wide variety of samples. The use of 13 nm illumination is of particular interest for materials science and the imaging of next-generation nanofabricated devices. Prior to this work, there was an unmet need for ...

by Porter C; Tanksalvala M; Gerrity M; et al.

Tags: Coherent Diffractive Imaging, EUV

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