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Christina L. Porter

Recent Posts

Complex EUV imaging reflectometry

Spatially resolved 3D composition determination and dopant profiling with a tabletop 13nm source

With increasingly 3D devices becoming the norm, there is a growing need in the semiconductor industry and in materials science for high spatial resolution, non-destructive metrology techniques capable of determining ...

by Christina L. Porter

Tags: Semiconductor, EUV, Coherent Diffractive Imaging

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