Using a Spectra-Physics Solstice Ace Ti:sapphire-based femtosecond amplifier and a KMLabs’ XUUS-5 high-harmonic-generation system we demonstrate a high flux, stable, coherent EUV light source with...

Imec, a world leader in nanoelectronics and digital technologies, reported using KMLabs' 13.5 nm XUUS high harmonic generation source for printing 20nm pitch line/spaces using interference...

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New Class of MHz Repetition-rate Vacuum-ultraviolet Laser Source Based on Highly-cascaded Harmonic Generation

Highly-cascaded harmonic generation (HCHG) process allows for coherent upconversion of...

The 22nd China International Optoelectronic Exposition (CIOE 2020)

Dates:  September 9-11, 2020

The new XUUS 5 from KMLabs

KMLabs is proud to announce the launch of the fifth generation of our XUUS high harmonic generation (HHG) source. The new XUUS 5 is by far the most stable, refined, and...

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Webinar Announcement

In collaboration with our Australian Distributors at AXT, KMLabs is pleased...

Dan Hickstein, Hyperion Product Manager at KMLabs, gave a CLEO talk on May 13th, discussing our latest developments in laser sources for the vacuum ultraviolet (VUV) range. The Hyperion VUV laser...

Seth Cousin, Director of Products at KMLabs, gave a CLEO talk discussing KMLabs' collaboration with imec:  attolab. The aim of imec's attolab is to study ultrafast kinetics of EUV exposure processes...