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Recap of 3/24 OSA webinar "High-Harmonic Sources for Material Development and Metrology in the Semiconductor Industry"

April 22, 2021

The webinar hosted on 3/24 by the OSA Short Wavelength Sources and Attosecond/High Field Physics Technical Group showcased a very recent important technological application of attosecond science in...

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Attolab uses KMLabs' 13nm EUV source to demonstrate the high-NA capabilities of EUV interference lithography

February 10, 2021

Imec, a world leader in nanoelectronics and digital technologies, reported using KMLabs' 13.5 nm XUUS high harmonic generation source for printing 20nm pitch line/spaces using interference...

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World's first phase-sensitive EUV imaging reflectometer on 3D nanostructure characterization

February 1, 2021

KMLabs, STROBE Science and Technology Center at CU Boulder, and imec's Attolab have worked collaboratively to present the world's first phase-sensitive extreme ultraviolet (EUV) imaging reflectometer.

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Replay ICALEO Talk:  Update on imec's attolab

October 19, 2020
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Extend your laser capabilities to VUV, XUV, SXR...

June 16, 2020
The new XUUS 5 from KMLabs

KMLabs is proud to announce the launch of the fifth generation of our XUUS high harmonic generation (HHG) source. The new XUUS 5 is by far the most stable, refined, and...

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Replay our CLEO talk on EUV laser technology and semiconductor applications

May 21, 2020

Seth Cousin, Director of Products at KMLabs, gave a CLEO talk discussing KMLabs' collaboration with imec:  attolab. The aim of imec's attolab is to study ultrafast kinetics of EUV exposure processes...

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Come see us at CLEO during the virtual sessions

May 5, 2020

Our very own, Dan Hickstein (Product Manager of the Hyperion VUV Laser System) and Seth Cousin (Director of Products) have CLEO talks on May 13th and 14th during the virtual technical sessions....

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Finding The Source Of EUV Stochastic Effects

April 17, 2019

Resolving problems in advanced lithography could push this technology much more into the mainstream, but that won’t be easy.

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imec to install high NA EUV imaging and attosecond lab to probe lithography

February 27, 2019

San Francisco, California, February 26, 2019 — Today, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, and KMLabs, pioneers and world leaders in...

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