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EUV-Colloidal Talbot Lithography

September 23, 2026

EUV coherent Talbot lithography (CTL) uses the self-imaging of diffracted light to create periodic structures with features smaller than those of the initial pattern. Beyond conventional transmission...

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KMLabs' XUUS™-5 integrated in-situ with Spectra-Physics Solstice® Ace™ delivers high-flux 30-120 eV EUV photons

July 7, 2021

Using a Spectra-Physics Solstice Ace Ti:sapphire-based femtosecond amplifier and a KMLabs’ XUUS-5 high-harmonic-generation system we demonstrate a high flux, stable, coherent EUV light source with...

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KMLabs' XUUS-5 high harmonic source delivers exceptional performance when driven directly by Light Conversion's PHAROS laser

May 6, 2021

Using Light Conversion’s industrial-grade PHAROS femtosecond laser and KMLabs’ XUUSTM-5 high-harmonic-generation system we demonstrate a high flux, ultrastable, coherent EUV light source with photon...

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World's first phase-sensitive EUV imaging reflectometer on 3D nanostructure characterization

February 1, 2021

KMLabs, STROBE Science and Technology Center at CU Boulder, and imec's Attolab have worked collaboratively to present the world's first phase-sensitive extreme ultraviolet (EUV) imaging reflectometer.

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Replay ICALEO Talk:  Update on imec's attolab

October 19, 2020
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Replay FiO Talk on MHz VUV Laser Technology

September 15, 2020

New Class of MHz Repetition-rate Vacuum-ultraviolet Laser Source Based on Highly-cascaded Harmonic Generation

Highly-cascaded harmonic generation (HCHG) process allows for coherent upconversion of...

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Replay our CLEO talk on EUV laser technology and semiconductor applications

May 21, 2020

Seth Cousin, Director of Products at KMLabs, gave a CLEO talk discussing KMLabs' collaboration with imec:  attolab. The aim of imec's attolab is to study ultrafast kinetics of EUV exposure processes...

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KMLabs direct diode pumped Ti:sapphire ultrafast regenerative amplifier a Top Download in Optics Express

March 21, 2017

Over ~>90% of ultrafast science research and development is done with using ultrafast Ti:sapphire lasers, a technology developed nearly 20 years ago. The great advantages of Ti:sapphire lasers are...

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