Ultrafast Coherent EUV beams using the KMLabs XUUS
Author:
Xiaoshi Zhang, Eric Mountford, Matthew Kirchner, and Henry Kapteyn
Tag: High Harmonic, XUUS
Publication Source:
KMLabs
![wooden-image-new wooden-image-new](https://www.kmlabs.com/hs-fs/hubfs/KM_Lab_July_2018/banner-images/wooden-image-new.jpg?width=1200&name=wooden-image-new.jpg)
Author:
Tag: High Harmonic, XUUS
Publication Source:
KMLabs WyvernTM ultrafast amplifier, combined with the KMLabs XUUS high harmonic generation (HHG) source, provides the first ultra-stable, engineered, coherent EUV beams at flux levels enabling a broad range of applications in spectroscopy and imaging, including at the technologically significant EUV lithography wavelength of 13.5 nm (≈ 92 eV).
KMLabs XUUS maximizes the conversion efficiency of laser to HHG beams through phase-matched conversion in hollow waveguides. Several key elements of a workhorse XUUSTM HHG tabletop x-ray laser system include:
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