EUV coherent Talbot lithography (CTL) uses the self-imaging of diffracted light to create periodic structures with features smaller than those of the initial pattern. Beyond conventional transmission...
Recent Posts
Using a Spectra-Physics Solstice Ace Ti:sapphire-based femtosecond amplifier and a KMLabs’ XUUS-5 high-harmonic-generation system we demonstrate a high flux, stable, coherent EUV light source with...
Using Light Conversion’s industrial-grade PHAROS femtosecond laser and KMLabs’ XUUSTM-5 high-harmonic-generation system we demonstrate a high flux, ultrastable, coherent EUV light source with photon...
KMLabs, STROBE Science and Technology Center at CU Boulder, and imec's Attolab have worked collaboratively to present the world's first phase-sensitive extreme ultraviolet (EUV) imaging reflectometer.
