Arterium Vacuum Beamline Modules

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High efficiency, modular vacuum beamline

KMLabs’ Arterium vacuum beamline provides optical elements required to connect the EUV source to an experimental end-station at high efficiency, stability and flexibility. Arterium incorporates modular components that may be optionally and readily installed (by the customer) into the beamline and HHG system, as needed, without compromising the beamline vacuum.

The optics and windows used in various modules are carefully selected to maximize efficiency and minimize dispersion effects which would distort/prolong the ultrashort pulses.

To propagate without significant attenuation, the beam is maintained under vacuum throughout the beamline. For a system with multiple experimental stations, the Aretriuim SwitchYard module enables re-directing the EUV photons to the experimental chamber of choice.

Features