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Filter Wheels
KMLabs filter wheels are extremely useful accessories for the XUUS eXtreme Ultraviolet Ultrafast Source:
• Each wheel includes four apertures
which can be rotated into the beam path
downstream from the capillary
• One aperture allows gas flow when pumping down and
venting the vacuum
system without the risk of break the thin filters.
• The other three apertures allow for mounting thin
film filters of varying
thickness and composition
• Can be used to optimize the ratio of EUV transmission/ IR
block for different
EUV wavelengths
• Can be used to calibrate measurements of the EUV flux
• Two filter wheels with two metal filters in series
with offset pinholes are optimal
for preventing holes in a single metal plate from transmitting IR
light
